Direct writing of hierarchical micro/nanofibers have recently gained popularity in flexible/stretchable electronics due to its low cost, simple process and high throughput. A kinetically controlled mechanoelectrospinning (MES) is developed to directly write diversified hierarchical micro/nanofibers in a continuous and programmable manner. Unlike conventional near-field electrospinning, our MES method introduces a mechanical drawing force, to simultaneously enhance the positioning accuracy and morphology controllability. The MES is predominantly controlled by the substrate speed, the nozzle-to-substrate distance, and the applied voltage. As a demonstration, smooth straight, serpentine, self-similar, and bead-on-string structures are direct-written on silicon/elastomer substrates with a resolution of 200 nm. It is believed that MES can promote the low-cost, high precision fabrication of flexible/stretchable electronics or enable the direct writing of the sacrificial structures for nanoscale lithography.