Cu-Al-O nanofibers are synthesized by an electrospinning method. After electrospinning process, these nanofibers were thermally treated at different temperatures from 900 to 1 100 degrees C. The morphology and crystal structure of the fibers were analyzed by scanning electron microscopy and X-ray diffraction. Thick film gas sensors were fabricated by spinning the nanofibers on a ceramic substrate with Au-Pt interdigitated electrodes. These sensors exhibited high ozone sensing properties at room temperature. When the sensors were exposed to 100 ppm ozone, the response time was about 2.74 s, and the recovery was about 12.68 s.