In this study, a ZnO nanofiber biosensor design is reported. ZnO nanofibers were obtained by electrospinning process followed by calcination. As a novel fabrication method, amorphous thin film of AIN(x) deposited by reactive magnetron sputtering, was proposed as a protective and stabilizing layer in subsequent technological processes. This allowed to use photolithography techniques for fabrication of the electrospun ZnO nanofibers sensor structures which is first time reported. The wet etching of AIN protective layer, Ti/Au ohmic contacts to ZnO fibers and polyimide passivating film have completed the design. Topography of the sensor structure was investigated using AFM and SEM. I-V measurements made for electrical characterization of ohmic contacts and nanofibers in different solutions environments including biological agent are reported. (C) 2011 Elsevier B.V. All rights reserved.